SOME EXPERIMENTS REGARDING MAGNETRON SPUTTERING DEPOSITION WITH SMALL CAPACITY DEVICES

  • Ioan Moga University of Oradea, Faculty of Management and Technological Engineering
  • Remus Ghincu University of Oradea, Faculty of Management and Technological Engineering
  • Traian Costea University of Oradea, Faculty of Management and Technological Engineering
  • Dan Tarca University of Oradea, Faculty of Management and Technological Engineering
  • Octavian Alin Moldovan University of Oradea, Faculty of Management and Technological Engineering
Keywords: magnetron sputtering, electronic device testing, atomic force microscopy

Abstract

In this paper the authors describe the testing of electric devices and magnetic components which should be used to set up a magnetron sputtering system. The results of tests are presented in the form of micro and nanoscopic analysis made with optical and atomic force microscopy. The experimental installation was realized at the University of Oradea, Faculty of Management and Technological Engineering in the SMARTMAT Laboratory.

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Published
2018-12-31
How to Cite
Moga, I., Ghincu, R., Costea, T., Tarca, D., & Moldovan, O. (2018). SOME EXPERIMENTS REGARDING MAGNETRON SPUTTERING DEPOSITION WITH SMALL CAPACITY DEVICES. Nonconventional Technologies Review, 22(4). Retrieved from http://revtn.ro/index.php/revtn/article/view/54