TECHNOLOGICAL ASPECTS REGARDING THE USE OF PHOTOLITOGRAPHY IN OBTAINING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS). Nonconventional Technologies Review, [S. l.], v. 21, n. 1, 2017. Disponível em: https://revtn.ro/index.php/revtn/article/view/166. Acesso em: 17 apr. 2026.