MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) AND APPLICATIONS IN MEDICINE

Abstract

The paper presents the MEMS devices and their applications that provide micro and nanodimensional functions in all the important areas. These are microsystems obtained by integrating mechanical elements, materials with special properties (ferrous, piezo- etc.) and electronic components on a common substrate (usually encapsulated on silicon/glass plates) by specific micro-manufacturing technologies. Miniaturized systems have a much faster reaction time, faster analyzes and results, automated increased possibilities with lower risks and costs. For this reason, most researches are made in order to realise small-scale versions of the existing systems for micro and nano levels. One of the most important areas in wich MEMS are in continous development is Medicine.